Student paper

In-situ characterization of PECVD layer stresses

Bachelor- or Master thesis

The aim of your work is to determine the layer stresses during a plasma coating process.

Topic of the work:

Thin films have the potential to replace multi-material barriers in plastics technology. This means that recyclable packaging can be realized. During the deposition of thin layers using plasma processes, layer stresses occur, among other things, which strongly influence the properties of the layers. Characterizing the stresses is therefore an important step towards understanding the mechanical behaviour of thin films on plastic substrates and developing environmentally friendly packaging.


Stuwi Konzeptentwicklung Probenhalter© IKV
Plasmabeschichtung eines Kunststoffbehälters.

Objective:

The aim of your work is to make it possible to measure the layer stresses of the depositing layers during the PECVD coating process using a laser detection system.

The measured layer stresses as a function of the substrate temperature are to be correlated with the process parameters. This data will help to better understand what happens during the PECVD coating process and simplify the development of PECVD coatings.

Your task:

Development of the state of the art Development of a method for recording layer stresses in real time
Construction of a laser measurement system on the reactor based on an existing concept Transfer of the results into a suitable simulation model
Development of a test plan Evaluation interpretation and correlation of the results

Your profile:

  • You have experience and interest in experimental work
  • You want to develop your skills in a dynamic team in current research
  • You are motivated and have a high degree of initiative
  • Ideally you have experience with laser measurement technology (not mandatory)

If you have any questions or are already interested in this thesis at IKV, please apply.