{"id":12776,"date":"2026-06-10T11:45:46","date_gmt":"2026-06-10T09:45:46","guid":{"rendered":"https:\/\/ikv-aachen.de\/student-research-theses\/commissioning-and-process-control-of-a-novel-peald-reactor\/"},"modified":"2026-06-16T14:06:19","modified_gmt":"2026-06-16T12:06:19","slug":"commissioning-and-process-control-of-a-novel-peald-reactor","status":"publish","type":"cpt_ikv_srt","link":"https:\/\/ikv-aachen.de\/en\/student-research-theses\/commissioning-and-process-control-of-a-novel-peald-reactor\/","title":{"rendered":"Commissioning and process control of a novel PEALD reactor"},"content":{"rendered":"<style type=\"text\/css\">\n    #single-header-block_67ddc29ab5ca06d08a33a646c4a8d2c9 .swiperThumbsNavi .swiper-slide {\n        opacity: 0.4;\n    }\n\n    #single-header-block_67ddc29ab5ca06d08a33a646c4a8d2c9 .swiperThumbsNavi .swiper-slide-thumb-active {\n        opacity: 1;\n    }\n<\/style>\n    <section id=\"single-header-block_67ddc29ab5ca06d08a33a646c4a8d2c9\" class=\"block-single-header theGridWrapper \">\n        <div class=\"theGrid12\">\n            <div class=\" col-start-2 col-span-10 md:col-start-3  md:col-span-8\">\n                <h2 class=\"font-serif font-semibold text-blue text-sm w-4\/5\">\n                    Bachelor&#8217;s thesis, master&#8217;s thesis or research laboratory                <\/h2>\n                                                    <div class=\"skewToMiddle\">\n                        <div class=\"relative  text-blue text-sm font after:border-2  after:border-blue rounded-xl bg-green-lighter  p-base -rotate-6 my-xl  after:block after:absolute after:w-full after:h-full after: after:-z-10 after:rounded-xl after:rotate-1  after:box-content  after:-top-2xs after:-left-2xs after:bg-blend-multiply  leading-snug \">\n                            <div class=\"skewToMiddleInner\">\n                                The aim of your work is to describe a novel measurement method using a model.                            <\/div>\n                        <\/div>\n                    <\/div>\n                            <\/div>\n        <\/div>\n    <\/section>\n\n\n<figure class=\" relative flex flex-col gap-2xs mb-xs md:mb-l xl:mb-xl\"><img decoding=\"async\"  class=\" w-full  \"  src=\"https:\/\/ikv-aachen.de\/wp-content\/uploads\/2026\/06\/Stuwi-PEALD-Reaktor.png\" srcset=\"https:\/\/ikv-aachen.de\/wp-content\/uploads\/2026\/06\/Stuwi-PEALD-Reaktor-748x499.png 748w, https:\/\/ikv-aachen.de\/wp-content\/uploads\/2026\/06\/Stuwi-PEALD-Reaktor-1536x1024.png 1536w, https:\/\/ikv-aachen.de\/wp-content\/uploads\/2026\/06\/Stuwi-PEALD-Reaktor-768x512.png 768w\" sizes=\"auto, (max-width: 1536px) 100vw, 1536px\" width=\"1536\" height=\"1024\" alt=\"Stuwi-PEALD-Reaktor\" loading=\"lazy\" \/><span class=\" text-copyright order-3 justify-end text-right w-full  w-full \">&copy; IKV<\/span><figcaption class=\" w-full  text-figcaption justify-end text-right \"><\/figcaption><\/figure>\n\n\n<h3 class=\"wp-block-heading\">Topic of the work:<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">Plasma-enhanced atomic layer deposition (PEALD) enables the production of ultra-thin, high-quality coatings with excellent conformity and precise thickness control. Due to these properties, the process is becoming increasingly important for applications in surface modification, barrier coating and in energy and microelectronic systems.<\/p>\n\n\n\n<p class=\"wp-block-paragraph\">Within the scope of this work, a novel PEALD reactor is to be put into operation for the first time and investigated with regard to its process capability. This includes setting up and optimizing the plant technology, developing suitable process parameters and depositing and characterizing the first coating systems. The aim is to create the basis for reliable and reproducible operation of the reactor and to evaluate its potential for future research and development work.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">The work is written in this working group:<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">The work is carried out in the Plasma and Surface Technology working group. The research focus of the working group is on the development, optimization and characterization of plasma-assisted coating processes and the investigation of functional surfaces and thin films.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Scope of your thesis:<\/h3>\n\n\n\n<p class=\"wp-block-paragraph\">The aim of the work is the successful commissioning of a novel PEALD reactor and the development and evaluation of initial coating processes. Suitable process windows are to be identified, the reproducibility of the coating deposition investigated and the coatings produced characterized with regard to their essential properties.<\/p>\n\n\n\n<h3 class=\"wp-block-heading\">Your task:<\/h3>\n\n\n<style type=\"text\/css\">#table-from-csv-block_7a5540d9ae433159e487326a83ca142a table:not(thead) td:before { content: attr(data-col-name); }\n<\/style><section id=\"table-from-csv-block_7a5540d9ae433159e487326a83ca142a\" class=\"block-table-from-csv theGridWrapper  text-sm   \">\n\n<table class='w-full'>\n\n<thead class='font-semibold font-serif hidden  text-blue  lg:table-row-group'>\n\t<tr class=' flex flex-col mt-xs lg:border-t border-dashed first:border-none lg:border-white lg:table-row tableToNormal   '>\n\t\t<td class='grid grid-cols-2 gap-xs lg:table-cell before:block lg:before:hidden first:pl-2xs last:pr-2xs   before:text-right before:font-semibold before:font-serif align-top  py-3xs ' data-col-name='For a Bachelor's thesis, you will work on the following tasks:' >For a Bachelor&#039;s thesis, you will work on the following tasks:<\/td>\n\t\t<td class='grid grid-cols-2 gap-xs lg:table-cell before:block lg:before:hidden first:pl-2xs last:pr-2xs   before:text-right before:font-semibold before:font-serif align-top  py-3xs ' data-col-name='For a Master's thesis, you could also work on the following tasks:' >For a Master&#039;s thesis, you could also work on the following tasks:<\/td>\n\t<\/tr>\n\n<\/thead>\n\n<tbody class='lg:table-row-group'>\n\t<tr class=' flex flex-col mt-xs lg:border-t border-dashed first:border-none lg:border-white lg:table-row tableToNormal     odd:bg-green-lighter even:bg-green-lightest py-8 xl:py-2 '>\n\t\t<td class='grid grid-cols-2 gap-xs lg:table-cell before:block lg:before:hidden first:pl-2xs last:pr-2xs   before:text-right before:font-semibold before:font-serif align-top  py-3xs ' data-col-name='For a Bachelor's thesis, you will work on the following tasks:' >Research on the state of the art in PEALD and plasma-assisted thin film deposition<\/td>\n\t\t<td class='grid grid-cols-2 gap-xs lg:table-cell before:block lg:before:hidden first:pl-2xs last:pr-2xs   before:text-right before:font-semibold before:font-serif align-top  py-3xs ' data-col-name='For a Master's thesis, you could also work on the following tasks:' >investigation of the influence of process parameters on layer properties<\/td>\n\t<\/tr>\n\t<tr class=' flex flex-col mt-xs lg:border-t border-dashed first:border-none lg:border-white lg:table-row tableToNormal     odd:bg-green-lighter even:bg-green-lightest py-8 xl:py-2 '>\n\t\t<td class='grid grid-cols-2 gap-xs lg:table-cell before:block lg:before:hidden first:pl-2xs last:pr-2xs   before:text-right before:font-semibold before:font-serif align-top  py-3xs ' data-col-name='For a Bachelor's thesis, you will work on the following tasks:' >Support with commissioning and qualification of the reactor<\/td>\n\t\t<td class='grid grid-cols-2 gap-xs lg:table-cell before:block lg:before:hidden first:pl-2xs last:pr-2xs   before:text-right before:font-semibold before:font-serif align-top  py-3xs ' data-col-name='For a Master's thesis, you could also work on the following tasks:' >evaluation of process reproducibility and corrosion resistance<\/td>\n\t<\/tr>\n\t<tr class=' flex flex-col mt-xs lg:border-t border-dashed first:border-none lg:border-white lg:table-row tableToNormal     odd:bg-green-lighter even:bg-green-lightest py-8 xl:py-2 '>\n\t\t<td class='grid grid-cols-2 gap-xs lg:table-cell before:block lg:before:hidden first:pl-2xs last:pr-2xs   before:text-right before:font-semibold before:font-serif align-top  py-3xs ' data-col-name='For a Bachelor's thesis, you will work on the following tasks:' >Development and optimization of initial deposition processes<\/td>\n\t\t<td class='grid grid-cols-2 gap-xs lg:table-cell before:block lg:before:hidden first:pl-2xs last:pr-2xs   before:text-right before:font-semibold before:font-serif align-top  py-3xs ' data-col-name='For a Master's thesis, you could also work on the following tasks:' > Investigation of the chemical composition of individual layers using TOF-SIMS, FT-IR and EDX<\/td>\n\t<\/tr>\n\t<tr class=' flex flex-col mt-xs lg:border-t border-dashed first:border-none lg:border-white lg:table-row tableToNormal     odd:bg-green-lighter even:bg-green-lightest py-8 xl:py-2 '>\n\t\t<td class='grid grid-cols-2 gap-xs lg:table-cell before:block lg:before:hidden first:pl-2xs last:pr-2xs   before:text-right before:font-semibold before:font-serif align-top  py-3xs ' data-col-name='For a Bachelor's thesis, you will work on the following tasks:' >Production and characterization of thin films<\/td>\n\t\t<td class='grid grid-cols-2 gap-xs lg:table-cell before:block lg:before:hidden first:pl-2xs last:pr-2xs   before:text-right before:font-semibold before:font-serif align-top  py-3xs ' data-col-name='For a Master's thesis, you could also work on the following tasks:' ><\/td>\n\t<\/tr>\n\t<tr class=' flex flex-col mt-xs lg:border-t border-dashed first:border-none lg:border-white lg:table-row tableToNormal     odd:bg-green-lighter even:bg-green-lightest py-8 xl:py-2 '>\n\t\t<td class='grid grid-cols-2 gap-xs lg:table-cell before:block lg:before:hidden first:pl-2xs last:pr-2xs   before:text-right before:font-semibold before:font-serif align-top  py-3xs ' data-col-name='For a Bachelor's thesis, you will work on the following tasks:' >Evaluation and documentation of the experimental results<\/td>\n\t\t<td class='grid grid-cols-2 gap-xs lg:table-cell before:block lg:before:hidden first:pl-2xs last:pr-2xs   before:text-right before:font-semibold before:font-serif align-top  py-3xs ' data-col-name='For a Master's thesis, you could also work on the following tasks:' ><\/td>\n\t<\/tr>\n\n<\/tbody>\n<\/table>\n\n<\/section>\n\n\n<h3 class=\"wp-block-heading\">Your profile:<\/h3>\n\n\n\n<ul class=\"wp-block-list\">\n<li>Natural science or technical studies (physics, materials science, mechanical engineering, mathematics, etc.)<\/li>\n\n\n\n<li>Independent processing of complex problems<\/li>\n\n\n\n<li>Experience in surface or coating technology is an advantage, but not a prerequisite<\/li>\n\n\n\n<li>Interest in practical experiments and working with experimental plant technology<\/li>\n<\/ul>\n\n\n\n<p class=\"wp-block-paragraph\">Work can begin immediately. If you are interested, just get in touch!<\/p>\n","protected":false},"excerpt":{"rendered":"<p>The aim of the work is the successful commissioning of a novel PEALD reactor and the development and evaluation of initial coating processes. Suitable process windows are to be identified, the reproducibility of the coating deposition investigated and the coatings produced characterized with regard to their essential properties.<\/p>\n","protected":false},"featured_media":12809,"parent":0,"template":"","srtk":[807,808,814],"research_fields":[834,842,1174],"esl":[685],"class_list":["post-12776","cpt_ikv_srt","type-cpt_ikv_srt","status-publish","has-post-thumbnail","hentry","srtk-bachelor-thesis","srtk-master-thesis","srtk-research-lab","research_fields-hydrogen-technologies","research_fields-plasma-technology","research_fields-simulation-en","esl-simulative"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v28.5 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>Commissioning and process control of a novel PEALD reactor | IKV-Aachen<\/title>\n<meta name=\"description\" content=\"The aim of the work is the successful commissioning of a novel PEALD reactor and the development and evaluation of initial coating processes. 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