Student paper

Commissioning and process control of a novel PEALD reactor

Bachelor’s thesis, master’s thesis or research laboratory

The aim of your work is to describe a novel measurement method using a model.
Stuwi-PEALD-Reaktor© IKV

Topic of the work:

Plasma-enhanced atomic layer deposition (PEALD) enables the production of ultra-thin, high-quality coatings with excellent conformity and precise thickness control. Due to these properties, the process is becoming increasingly important for applications in surface modification, barrier coating and in energy and microelectronic systems.

Within the scope of this work, a novel PEALD reactor is to be put into operation for the first time and investigated with regard to its process capability. This includes setting up and optimizing the plant technology, developing suitable process parameters and depositing and characterizing the first coating systems. The aim is to create the basis for reliable and reproducible operation of the reactor and to evaluate its potential for future research and development work.

The work is written in this working group:

The work is carried out in the Plasma and Surface Technology working group. The research focus of the working group is on the development, optimization and characterization of plasma-assisted coating processes and the investigation of functional surfaces and thin films.

Scope of your thesis:

The aim of the work is the successful commissioning of a novel PEALD reactor and the development and evaluation of initial coating processes. Suitable process windows are to be identified, the reproducibility of the coating deposition investigated and the coatings produced characterized with regard to their essential properties.

Your task:

Research on the state of the art in PEALD and plasma-assisted thin film deposition investigation of the influence of process parameters on layer properties
Support with commissioning and qualification of the reactor evaluation of process reproducibility and corrosion resistance
Development and optimization of initial deposition processes Investigation of the chemical composition of individual layers using TOF-SIMS, FT-IR and EDX
Production and characterization of thin films
Evaluation and documentation of the experimental results

Your profile:

  • Natural science or technical studies (physics, materials science, mechanical engineering, mathematics, etc.)
  • Independent processing of complex problems
  • Experience in surface or coating technology is an advantage, but not a prerequisite
  • Interest in practical experiments and working with experimental plant technology

Work can begin immediately. If you are interested, just get in touch!