Student paper

Development and Characterisation of a Piezoelectrically Ignited Atmospheric-Pressure Plasma Source for PECVD Processes

Bachelor’s thesis or master’s thesis

How does a piezoelectric element become a high-tech coating system? As part of an industry project, develop an innovative atmospheric pressure plasma source for the coating technology of the future.
Stuwi-Piezoelektrisch hgezündete Atmosphärendruck-Plasmaquelle für PECVD_Prozesse© IKV

Topic of the work:

Plasma-enhanced chemical vapor deposition (PECVD) at atmospheric pressure is attracting increasing attention because it eliminates the need for costly vacuum systems. An exciting approach to generating these plasmas is the use of piezoelectric transformers. These devices use mechanical resonance to generate high voltages in a compact form, thereby igniting an atmospheric cold plasma. One challenge here is introducing precursors into the plasma to deposit homogeneous functional layers without damaging the piezoceramic due to thermal stress or layer residues.

The work is related to this research project:

The work is part of an industrial project with a manufacturer of PECVD coating systems. The goal is to simplify the coating process by eliminating the need for complex high-frequency and low-pressure technology. The integration of piezoelectric elements promises to significantly simplify the process and increase efficiency for the local coating of surfaces.

Objective:

The objective of this work is the experimental commissioning and characterization of a piezoelectric plasma source for PECVD deposition. The aim is to investigate how process parameters (e.g. gas flow, electrical control of the piezoelectric element, gas mixture) affect the plasma parameters and the resulting coating quality.

Your task:

Conducting a literature review on the state of the art in piezoelectric plasma generators and atmospheric-pressure PECVD Expanded literature review on the current state of the art
Construction and commissioning of an atmospheric pressure plasma reactor with piezoelectric ignition Analysis of the morphology and chemical composition of the layers using scanning electron microscopy, EDX, and FT-IR spectroscopy
Design and execution of experimental series to investigate ignition stability and determine the separation rate as a function of process parameters Determination of the process windows within which stable separation is possible

Your profile:

  • A degree in an engineering or science field (e.g., mechanical engineering, chemical engineering, materials science, physics, or a related field)
  • Experience in conducting experimental studies is a plus
  • Ability to independently address complex scientific issues
  • A strong interest in experimental plant engineering and practice-oriented research

Work can begin immediately. If you’re interested, just get in touch with me!